The MIGNON project proposes a novel approach for chemical detection in gases by eliminating the need for application-specific sensitive layers, which are prone to reliability issues and require lengthy development cycles. Instead, the strategy relies on measuring multiple physical properties of gases (e.g., viscosity, mass density, acoustic wave speed/attenuation) using two types of resonant MEMS devices: microcantilevers and capacitive micromachined ultrasonic transducers (CMUTs). This multi-parametric approach enables discrimination of complex gas mixtures (beyond binary) without chemical functionalization, addressing niche markets more efficiently. Partners have been selected for their world-class expertise and for their ability to work together on multidisciplinary projects. MIGNON will represent a significant progress of the collaborations between IMS, LAAS, GREMAN and CRHEA.
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MIGNON
The MIGNON project develops a generic gas detection system without sensitive layers, using silicon resonant MEMS (microcantilevers and CMUTs) to measure physical properties of gases. This more reliable and reversible method targets leakage detection of industrial gases (O₂, N₂, H₂, CH₄, CO₂, He) and also includes silicon carbide MEMS for harsh environments.
